Fabrication Error Analysis of 4-step Binary Optic Elements

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Chinese Journal of Lasers, Volume. 25, Issue 5, 415(1998)

[in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]², [in Chinese]², and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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In this paper, an analytic formula is given to show the relationship between the diffractive efficiency and fabrication error of 4- step binary optic elements by using the scalar diffractive theory. The formula has been disscussed in some situations and compared with the results of simulation complished by us before. The results of the two methods agree well. The finding may play a role in guiding the fabrication of binary optic elements.

Keywords

diffractive efficiency fabrication error theoretical analysis binary optics

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication Error Analysis of 4-step Binary Optic Elements[J]. Chinese Journal of Lasers, 1998, 25(5): 415

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Paper Information

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Received: Dec. 31, 1996

Accepted: --

Published Online: Oct. 18, 2006

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DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology