Piezoelectrics & Acoustooptics, Volume. 46, Issue 4, 491(2024)
Design of a High-Density Piezoelectric Deformable Mirror Driving Power Supply
Piezoelectric deformable mirror is used as an actuator for adaptive optics system. In this study, a novel piezoelectric ceramic driving power supply is designed for high-precision and highly dynamic application of piezoelectric deformable mirror. The design adopts the linear correction network to ensure the stability of the amplification circuit. Furthermore, the reasons that affect the output accuracy and nonlinear distortion are analyzed. The experimental results show that when driving a capacitive load of 0.33 μF, the drive power supply exhibits a large signal bandwidth of up to 3 kHz, rise time of the step response greater than 80 μs, fall time greater than 130 μs, and output linearity of 99.6%.
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XU Xing, SHAO Meng, LI Hongwen. Design of a High-Density Piezoelectric Deformable Mirror Driving Power Supply[J]. Piezoelectrics & Acoustooptics, 2024, 46(4): 491
Received: Apr. 11, 2024
Accepted: --
Published Online: Sep. 18, 2024
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