MoOxthin film is considered to be an ideal choice in border-less TFT LCD for its low reflectivity. In this work, MoOx thin films are deposited at room temperature by utilizing magnetron sputtering on glass substrate. The properties of MoOx films, composite films of MoOx and different metal films are studied by different methods. The results show that MoOx film can be deposited on glass substrates without undercoating because of the good adhesion between them. The adhesion of MoOx to Al and Cu is better than that of Mo and Mo alloys, such as MTD. The square resistance of MoOx thin film is large and can be neglected when it is composed with metal layers. The thickness of MoOx has a great influence on the reflectivity of composite films of MoOxand metal film. Different MoOx thicknesses show different colors when it is composed with metal layers while the thickness of metal layer has little effect on color. In the production of border-less TFT LCD, metal layer can be choose according to the properties of MoOx to match with and the color of products can be adjusted by changing the thickness of MoOx layers to meet the color preferences of the customers on the basis of meeting the requirements of reflectivity.