Laser Technology, Volume. 49, Issue 1, 87(2025)

Segmental nonlinear fitting calibration of 2-D ultra large stroke fast steering mirror

LI Xiaotian, CHEN Qingshan*, WANG Yanlin, and LIU Lishuang
Author Affiliations
  • School of Instrument Science and Optoelectronics Engineering, Beijing Information Science and Technology University, Beijing 100192, China
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    In order to achieve high repeatability and resolution of a 2-D ultra large stroke fast steering mirror(FSM) that integrates high-speed scanning and precise pointing functions, the 2-D segmental calibration was studied. The angle calibration system of 2-D ultra large strok FSM was constructed. The polynomial fitting method was optimized to obtain the segmental nonlinear fitting method, the calibration model was theoretically analyzed and experimentally tested. The results show that with the range of ±5°, the calibration error of the traditional polynomial fitting method is merely 1.7 mrad, while the fitting error of the optimized segmental nonlinear fitting method is less than 8.2 μrad, and the resolution of x and y axes can reach 4.6 μrad and 5.6 μrad respectively, and the repeatability of x and y axes is 19.4 μrad and 9.6 μrad respectively. This result plays an important role in the accurate control of 2-D ultra large stroke FSM.

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    LI Xiaotian, CHEN Qingshan, WANG Yanlin, LIU Lishuang. Segmental nonlinear fitting calibration of 2-D ultra large stroke fast steering mirror[J]. Laser Technology, 2025, 49(1): 87

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    Paper Information

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    Received: Dec. 5, 2023

    Accepted: Feb. 18, 2025

    Published Online: Feb. 18, 2025

    The Author Email: CHEN Qingshan (chenqqss@sina.com)

    DOI:10.7510/jgjs.issn.1001-3806.2025.01.014

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