Chinese Journal of Lasers, Volume. 12, Issue 11, 672(1985)
A compact long lifetime XeCl excimer laser
Investigations on operating parameters and lifetime of a small XeCl excimer laser using an improvrd corona type preionizer are reported.
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Liu Dawei. A compact long lifetime XeCl excimer laser[J]. Chinese Journal of Lasers, 1985, 12(11): 672
Category: laser devices and laser physics
Received: Oct. 25, 1984
Accepted: --
Published Online: Nov. 6, 2012
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CSTR:32186.14.