Opto-Electronic Engineering, Volume. 35, Issue 1, 55(2008)

Wide-range Grating Interferometer with Nanometer Resolution

CHU Xing-chun1,2、*, LV Hai-bao2, and ZHAO Shang-hong1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    Since both the measuring range and the resolution of a traditional grating interferometer were difficult to be improved simultaneously,a grating interferometry based on a single long metrology grating was presented.Firstly,an interferogram was generated by interference between the ±5 orders beams diffracted by the grating.The length of the grating was 400mm and its pitch was 10μm.The optical fringe multiplication achieved was 10.Then,a fringes subdividing method based on the time-shift property of Fast Fourier Transform (FFT) algorithm was developed.By calculating the phase change of the fringes at a certain position between two sequential acquisition interferogram,the fringes were subdivided electronically and the subdividing multiple was as high as 1000.During this course,the effect of energy leakage on the phase-extraction precision of FFT was suppressed by tailoring the acquisition interferogram into a few full-multiples of the fringes.The resulting subdividing precision could reach at least 1/1000 period of the fringes.Simulation and experimental results show the system resolution is 1nm and measurement precision is less than 10nm.

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    CHU Xing-chun, LV Hai-bao, ZHAO Shang-hong. Wide-range Grating Interferometer with Nanometer Resolution[J]. Opto-Electronic Engineering, 2008, 35(1): 55

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    Paper Information

    Category:

    Received: Apr. 20, 2007

    Accepted: --

    Published Online: Mar. 1, 2010

    The Author Email: Xing-chun CHU (kejdcxc@sohu.com)

    DOI:

    CSTR:32186.14.

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