An annealed proton-exchange LiNbO3 waveguides are fabricated and characterized in this paper. The refractive index profile after annealing is obtained by “selecting zero element” method. The empirical relations between waveguides parameter and fabrication conditions are established. The dispersion equation is also studied in guided-layer. The results are useful for applications of annealed proton-exchanged waveguides in photonics devices.