Optics and Precision Engineering, Volume. 33, Issue 1, 75(2025)

Precision glass molding for fiber collimating aspherical microlens array

Liheng GAO1, Qian YU1、*, Tianfeng ZHOU1, Jia ZHOU3, Xiuwen SUN1, Tao YAN2, and Benshuai RUAN4
Author Affiliations
  • 1School of Mechanical Engineering, Beijing Institute of Technology, Beijing0008, China
  • 2Jiangxi Phenix Optical Technology Co., Ltd., Shangrao334000, China
  • 3Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou21512, China
  • 4Cheerful Micro-Nano Technology (Ningbo) Co. Ltd., Ningbo315500, China
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    This study explores the application of precision glass molding (PGM) technology to enhance the machining accuracy and efficiency of aspherical microlens arrays (AMLA) for fiber array collimation. The research focuses on the control of mold machining accuracy and the implementation of a compensation approach to address form errors in AMLA fabrication. A localized spiral diamond milling method is introduced for machining nickel-phosphorus mold materials, tailored to the structural characteristics and stringent precision requirements of AMLA. Furthermore, a form error compensation method is developed, considering the high-temperature properties of mold and glass materials as well as process parameters affecting accuracy. By optimizing the mold profile through compensation design, the precision of PGM is significantly improved, achieving the high-accuracy fabrication of a 10×10 AMLA. The proposed process controls the form error peak-to-valley (PV) within 220-380 nm and achieves a surface roughness (Ra) of 7-10 nm, thereby enhancing optical performance. This work provides a viable and efficient technical framework for the high-precision, large-scale production of AMLA.

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    Liheng GAO, Qian YU, Tianfeng ZHOU, Jia ZHOU, Xiuwen SUN, Tao YAN, Benshuai RUAN. Precision glass molding for fiber collimating aspherical microlens array[J]. Optics and Precision Engineering, 2025, 33(1): 75

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    Paper Information

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    Received: Dec. 4, 2024

    Accepted: --

    Published Online: Apr. 1, 2025

    The Author Email: Qian YU (yu_qian@bit.edu.cn)

    DOI:10.37188/OPE.20253301.0075

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