Optics and Precision Engineering, Volume. 19, Issue 4, 844(2011)

Measurement of piezoelectric displacement characteristic curves using dynamic speckle correlation

ZHU Meng*, HUANG Zhan-hua, WANG Xiao-jun, and CAI Huai-yu
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    Dynamic speckle correlation method was presented to measure the piezoelectric ceramic characteristic curves and scale linear intervals in this paper. Firstly, the speckle intensity cross-correlation of a projection phase diffuser in the micro-system was calculated, and influences of the resolution and magnification of the micro-system on object displacement measuring were also discussed. During the calculation of cross-correlation, a progressive correlation method was used to avoid the de-correlation caused by the object surface. A sampling system for micro speckles was designed and the hysteresis curve of displacement induced by a piezoelectric ceramic was measured. Experimental results indicate that the theory precision of the measuring system is 0.082 μm when a micro objective is with magnification of 100 and NA of 1.25. In consideration of the diffraction limit, the theory precision of the measuring system is 0.348 μm. It concludes that the method satisfies the requirements of measuring and scaling of linear intervals. Comparing with other methods,the dynamic speckle correlation can improve the calculation speed and measuring precision.

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    ZHU Meng, HUANG Zhan-hua, WANG Xiao-jun, CAI Huai-yu. Measurement of piezoelectric displacement characteristic curves using dynamic speckle correlation[J]. Optics and Precision Engineering, 2011, 19(4): 844

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    Paper Information

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    Received: May. 6, 2010

    Accepted: --

    Published Online: Jun. 14, 2011

    The Author Email: ZHU Meng (zhumeng@tju.edu.cn)

    DOI:10.3788/ope.20111904.0844

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