Chinese Journal of Lasers, Volume. 36, Issue 8, 2115(2009)

A Method to Reduce Influence of Multi-Beam Interference in Sinusoidal Phase Modulation Fizeau Interferometer

Li Zhongliang1,2、*, Wang Xiangzhao1, Liu Yingming1, and Tang Feng1
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  • 1[in Chinese]
  • 2[in Chinese]
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    In a Fizeau interferometer using sinusoidal phase modulation technique, the variation of interference intensity with optical path difference (OPD) does not follow a rigorous cosine behaviour any more. This is because the presence of multi-reflection between the reference plate and the surface under test leads to multi-beam interferences. If the interference signal is processed according to double-beam interference theory, non-ignorable measurement error can be produced. In this paper, a sinusoidal phase modulation Fizeau interferometer used to measure micro-displacement with nanometer precision is established. The measurement error caused by multi-beam interference is analyzed in detail. Some parameters of the Fizeau interferometer are optimized and the measurement results are corrected using error compensation algorithm, so that the influence of multi-beam interference is reduced effectively.

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    Li Zhongliang, Wang Xiangzhao, Liu Yingming, Tang Feng. A Method to Reduce Influence of Multi-Beam Interference in Sinusoidal Phase Modulation Fizeau Interferometer[J]. Chinese Journal of Lasers, 2009, 36(8): 2115

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    Paper Information

    Category: measurement and metrology

    Received: Sep. 24, 2008

    Accepted: --

    Published Online: Aug. 13, 2009

    The Author Email: Li Zhongliang (lizhongliang@siom.ac.cn)

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