We propose a novel metamaterial structure process according to the transmission property of the Silicon-on-insulator (SOI) wafer. We also suggest an appropriate structure for the Micro-electro-mechanical System (MEMS) technique to achieve larger frequency modulation. This structure was assembled by a Split Ring Resonator (SRR) with a metal mesh within a unit cell. Our experimental studies on the composite structure indicate that the coupling of the metal mesh and the SRR significantly contribute to transparency at the terahertz range. Moreover, we experimentally demonstrated the performance of this structure by changing the relative positions of the SRR and the metal mesh. The unique resonance characteristics of this composite structure make it an excellent candidate for developing tunable terahertz components via integration with the MEMS technology