Journal of Synthetic Crystals, Volume. 51, Issue 1, 35(2022)
Microstructure and Optical-Electrical Properties of Phosphorus/Boron Co-Doped Silicon Nanocrystals
Si/SiO2 multilayers were fabricated by RF plasma enhanced chemical vapor deposition system, and phosphorus/boron (P/B) co-doped silicon nanocrystals (Si NCs) were obtained under the constricted crystallization of multilayers structures. Microstructures of P/B co-doped Si NCs/SiO2 multilayers and impurities distributions were studied by Raman, transmission electron microscopy (TEM) and X-ray photoelectron spectroscopy (XPS). Low temperature electron paramagnetic resonance (EPR) results indicate that the non-radiative defects on Si NCs surfaces can be passivated by P and B impurities. Hall effect manifests that P and B impurities can substitutionally incorporate into Si NCs inner. Meanwhile, P impurity exhibits higher doping efficiency than B. Near-infrared photoluminescence near 1 200 nm with the wavelength compatible for optical telecommunication was detected in the small-sized P/B co-doped Si NCs. The emission intensity can be enhanced by regulating the nominal P-doping concentration. According to the time-resolved photoluminescence and EPR results, the physical mechanisms of P-doping on the radiative and non-radiative recombination processes of Si NCs were discussed, which are responsible for the enhancement of 1 200 nm photoluminescence.
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LI Dongke, CHEN Jiaming, SUN Teng, ZHAI Zhangyin, CHEN Guibin. Microstructure and Optical-Electrical Properties of Phosphorus/Boron Co-Doped Silicon Nanocrystals[J]. Journal of Synthetic Crystals, 2022, 51(1): 35
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Received: Oct. 25, 2021
Accepted: --
Published Online: Mar. 2, 2022
The Author Email: Dongke LI (ldkest@nju.edu.cn)
CSTR:32186.14.