During the drilling with ultrasonic vibration, the dominant factor of the surface quality is the maximum depth of the scratch on the ceramic glass surface. Based on the brittle fracture mode of material removal, the calculation theoretical model is established. The influences of parameters are grit diamond, rotating speed of diamond tool and cutting speed. The best values of which are grit diamond 650#, rotating speed of diamond tool 12 000 rpm and cutting speed 5 mm/min based on the orthogonal experiment. It can improve the surface quality of ceramic glass. The obtained results are surface roughness Ra value of hole 0.055 1 μm after chemical polishing.