Piezoelectrics & Acoustooptics, Volume. 45, Issue 3, 342(2023)
Analysis of On-Wafer De-Embedding Method for One-Port SAW Resonator
In order to accurately design the SAW filter, it is necessary to extract accurate material parameters from the measured values of the reference SAW resonator. When measuring the SAW resonator, a single resonator cannot be directly tested, and a transmission line is required to contact the probe for measurement. The process of removing the influence of the transmission line is very important for the accurate extraction of SAW resonator material parameters. In this paper, several de-embedding methods of SAW resonators are introduced, including Open-Short algorithm, electromagnetic simulation method, segmented equivalent circuit model method, lumped parameter equivalent circuit method, and several commonly used de-embedding methods are verified and analyzed with examples.
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HAN Xiaoyu, SHUAI Yao, WU Chuangui, LUO Wenbo, PAN Xinqiang, ZHANG Wanli. Analysis of On-Wafer De-Embedding Method for One-Port SAW Resonator[J]. Piezoelectrics & Acoustooptics, 2023, 45(3): 342
Received: Jan. 11, 2023
Accepted: --
Published Online: Dec. 5, 2023
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