In order to improve cell gap stability of crystal display products, the relationship between the elastic recovery rate (ER) of photo spacer (PS) and the substrate films in thin film transistor liquid crystal display (TFT-LCD) was studied in this work. Firstly, PS samples with different substrate films were obtained by photolithograph process. Then, the SNU 3D microscope was utilized to characterize the size and height of PS samples, and the thicknesses of substrate films were measured by SEM. The ER was measured by dynamic ultra micro hardness tester (DUH) at last. Test results show that the ER of PS on bare glass is 3.9% higher than on normal substrate films when the loading force is 200 mN. While the Vickers hardness of over coat (OC) film vises, the ER of PS enhances obviously especially with higher loading force. The discrepancy of material A and B increases to 6.3% with 500 mN loading force. It is also found that the ER of PS decreases with the thicknsess of the substrate film of color resist. When the color resists thickness changes from 2.2 μm to 2.5 μm, the ER of PS on A and B decreases from 3.7% to 4.9%. In addition, the fatigue properties of PS on its base coating films are also studied. The results show that the elastic recovery rate of PS increases with the proportion of plastic deformation decreasing, and keeps steadily after 25 times as the number of press-in increases.