Light detection and ranging (LiDAR) system can be used to capture the distances and speeds of the tar-gets with high resolution and high accuracy, and can also form imaging. It is important for the applications such as mapping, and navigation, et al. This paper introduces the LiDAR solution based on micro-electromechanical system (MEMS) is a transitional scheme from mechanical one to solid-state. Meanwhile, in terms of the requirement of sol-id-state, the principles of Flash and optical phased array LiDAR are introduced in this paper. At the same time, the miniaturization trend of LiDAR is presented with optical phased array based on liquid crystal (LC) and integrated optical waveguides. At last, the performances and open issues of the solutions for LiDAR are concluded and the development trends of LiDAR are summarized with outlook.