Chinese Optics Letters, Volume. 12, Issue s2, S22202(2014)

Swing arm profilometer: improving the testing accuracy of large mirrors with shorter arms

Xiao Luo
Author Affiliations
  • Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanical and Physics, CAS, Changchun 130033, China
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    Swing arm profilometer is a useful metrology tool for large optics. For larger mirrors, the testing accuracy decreases as the arm becomes longer, while the testing accuracy requirement remains the same. We introduce a simple solution to make testing of large mirrors with shorter arms possible, which improves the testing accuracy, especially reduces the uncertainty of low-order shapes like astigmatism and trefoil. Simulation and experiment results show that testing uncertainty of low-order shape and high-frequency errors reaches 0.1 \mu m RMS, which faithfully meets the requirement of profile testing to guide the grinding and coarse polishing process.

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    Xiao Luo, "Swing arm profilometer: improving the testing accuracy of large mirrors with shorter arms," Chin. Opt. Lett. 12, S22202 (2014)

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Jan. 3, 2014

    Accepted: Mar. 15, 2014

    Published Online: Dec. 4, 2014

    The Author Email:

    DOI:10.3788/col201412.s22202

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