Chinese Optics Letters, Volume. 12, Issue s2, S22202(2014)
Swing arm profilometer: improving the testing accuracy of large mirrors with shorter arms
Swing arm profilometer is a useful metrology tool for large optics. For larger mirrors, the testing accuracy decreases as the arm becomes longer, while the testing accuracy requirement remains the same. We introduce a simple solution to make testing of large mirrors with shorter arms possible, which improves the testing accuracy, especially reduces the uncertainty of low-order shapes like astigmatism and trefoil. Simulation and experiment results show that testing uncertainty of low-order shape and high-frequency errors reaches 0.1 \mu m RMS, which faithfully meets the requirement of profile testing to guide the grinding and coarse polishing process.
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Xiao Luo, "Swing arm profilometer: improving the testing accuracy of large mirrors with shorter arms," Chin. Opt. Lett. 12, S22202 (2014)
Category: Optical Design and Fabrication
Received: Jan. 3, 2014
Accepted: Mar. 15, 2014
Published Online: Dec. 4, 2014
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