Optics and Precision Engineering, Volume. 19, Issue 8, 1709(2011)

13.5 nm Schwarzschild microscope and imaging experiment

WANG Xin1,2,3、*, MU Bao-zhong1,2, HUANG Yi1,2, ZHU Jing-tao1,2, WANG Zhan-shan1,2, and He Peng-fei3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    A Schwarzschild microscope working at 13.5 nm was developed. According to the theory of a coaxial two-mirror system, the optical structure of Schwarzschild objective was designed by eliminating third-order spherical aberrations, coma and astigmatism. Experiments show that the spatial resolution of the designed objective achieves 550 lp/mm within the field of ±0.3 mm with respect to the calculation of modulation transfer function. Based on the working wavelength and incidence angle of lights,the Mo/Si multilayer optics with the reflectivity of 61% at 13.5 nm was designed and fabricated. In order to remove visible and ultraviolet lights,a filter with materials of Zr, Si and Si3N4 was designed and fabricated,and the transmittance of 21.1% was obtained at 13.5 nm. With the purpose of demonstrating the resolution of microscope, the 60 lp/mm grid backlit by laser produced plasma was imaged via the Schwarzschild microscope on a Charge Coupled Device (CCD), and the results show that the imaging system can offer the resolution of 3 μm in the 0.5 mm field.It concludes that the resolution of imaging experiment is limited by the resolution of CCD camera.

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    WANG Xin, MU Bao-zhong, HUANG Yi, ZHU Jing-tao, WANG Zhan-shan, He Peng-fei. 13.5 nm Schwarzschild microscope and imaging experiment[J]. Optics and Precision Engineering, 2011, 19(8): 1709

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    Paper Information

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    Received: Mar. 1, 2010

    Accepted: --

    Published Online: Aug. 29, 2011

    The Author Email: WANG Xin (wangx@tongji.edu.cn)

    DOI:10.3788/ope.20111908.1709

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