Study on beam characteristics of excimer lasers

Lou Qihong; T. Yagi

Chinese Journal of Lasers, Volume. 17, Issue s1, 1(1990)

Lou Qihong¹ and T. Yagi²

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¹[in Chinese]

²[in Chinese]

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Abstract Get PDF(in Chinese)

The beam characteristics of exeimer lasers are detected by using a two dimensional CCD array. The beam uniformity and the drift of the gravity center of the beam pattern are investigated for long term operation of exeimer lasers. The relationship between the beam characteristics and discharge stability are discussed.

Keywords

beam characteristics CCD array exeimer lasers

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Lou Qihong, T. Yagi. Study on beam characteristics of excimer lasers[J]. Chinese Journal of Lasers, 1990, 17(s1): 1

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