The temporal profile of frequency tripled beam of the high power laser facility is measured using the distortionless sampling by the diffraction of the beam sampling grating, transient photodiode,high-speed digital oscillograph and the multiplexing technology of multichannel. The high resolution and dynamic range of the temporal profiles of frequency tripled beam is obtained. The detailed measurement technology and methods are important for the precision diagnosis of the temporal profile measurement system of frequency tripled beam of the high power laser facility.