Chinese Journal of Lasers, Volume. 37, Issue 2, 408(2010)
Study and Test on a Novel Fast Laser Scanner Based on Piezo-Actuators
Laser scanner is one of the most important components in lidar,laser detecting,laser processing,and so on. Existing scanners are difficult to realize fast linear scanning with low moment of inertia. A fast laser scanner based on novel piezoelectric actuators is designed,which has mechanical scanning angle of ±0.35° and first resonance frequency of 1872 Hz. Finite element analysis is used to design the scanner structure. Measured frequency response curve shows that the modes of the scanner are complicated. The scanning waveforms,spectrums and scan line images of triangle waveform actuated scanning at several frequencies are tested. The test results show that the hysteresis behavior and the resonances affect scanning linearity seriously. An open loop control method is designed,which consists of a software hysteresis compensator and notch filters in serials. The comparison of scanning waveforms and scan line photos of triangle waveform actuated scanning with and without open loop controller shows that the scanning linearity is improved effectively. The scanning nonlinearities of 100 Hz and 400 Hz triangle wave scanning reduce to 2% and 7% respectively from 6% and 27%. The scanner realizes fast linear scanning.
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Xiang Sihua, Chen Sihai, Wu Xin, Zheng Xiawei, Xiao Ding. Study and Test on a Novel Fast Laser Scanner Based on Piezo-Actuators[J]. Chinese Journal of Lasers, 2010, 37(2): 408
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Received: Feb. 20, 2009
Accepted: --
Published Online: Feb. 3, 2010
The Author Email: Sihua Xiang (xiang_s_h@163.com)