Piezoelectrics & Acoustooptics, Volume. 44, Issue 2, 256(2022)
Temperature Compensated SAW Delay Line Strain Sensor
SAW delay line, used as sensor, can be encoded to enable multi-point distributed measurements, and thus have been widely studied, In this paper, the SAW delay lines with different pairs of IDT were prepared on 128°Y-X cut LiNbO3 piezoelectric substrate, and the strain characteristics of the prepared SAW delay lines were investigated, The results show that the sensitivities of the SAW delay lines with 10, 20 and 30 IDT pairs were 1, 727 5 ps/με, 2, 046 7 ps/με and 3, 256 6 ps/με, respectively, The strain characteristics of the SAW delay lines are closely dependent on the angle between the directions of the applied strain and SAW propagation, namely, the delay time increases as the strain increases at 0° and the delay time decreases as the strain increases at 90°, Two SAW delay lines with different angles (0° and 90°) are combined to constitute strain sensor with differential structure, The experimental results show that this structure can cancel the effect of temperature, and that the accurate strains can be acquired even if the temperature fluctuates, The SAW delay line with differential structure demonstrated in this paper is expected to be applied to sense strain in environment with temperature fluctuations,
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YANG Xiaoyang, HUANG Fei, PENG Bin, HE Peng, ZHU Jialiang. Temperature Compensated SAW Delay Line Strain Sensor[J]. Piezoelectrics & Acoustooptics, 2022, 44(2): 256
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Received: Jan. 19, 2022
Accepted: --
Published Online: Jun. 14, 2022
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