Qualitative analysis methods can not completely avoid the effect from the ghost of compensator, thus a quantitative simulation analysis is proposed based on the theoretical analysis. Optical analysis software in the design stage is used to completely rule out the effect from the ghost. An example is addressed to illustrate the limitations of qualitative analysis methods, and to verify the validity of quantitative simulation analysis. This simulation provides a quantitative analysis method for the compensator design and analysis to improve the yield of compensator developed and the accuracy of testing, which is important for high-precision inspection techniques.