Opto-Electronic Engineering, Volume. 47, Issue 9, 190451(2020)

Research on field calibration method of straightness in five-degree-of-freedom measurement

Su Yuhao*, Duan Fajie, Jiang Jiajia, Fu Xiao, Zhang Cong, and Liu Wenzheng
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  • [in Chinese]
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    The field calibration of straightness is an important method to ensure the accuracy of on-line measure-ment. Based on the transceiver integrated laser five-degree-of-freedom measurement structure, the field calibration model was established aiming at the Abbe error, and the imaging error of retroreflector caused by the calibration platform. According to the calibration model and the angle measurement results of the five-degree-of-freedom measuring device, a compensation method of straightness calibration errors was proposed. Experimental results showed that the calibration coefficient error was within 0.2% when using the calibration method, and the calibration errors of straightness were effectively reduced. The calibration method made the error of calibration coefficient re-duce to less than 0.2%, and effectively improved the accuracy of straightness field calibration.

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    Su Yuhao, Duan Fajie, Jiang Jiajia, Fu Xiao, Zhang Cong, Liu Wenzheng. Research on field calibration method of straightness in five-degree-of-freedom measurement[J]. Opto-Electronic Engineering, 2020, 47(9): 190451

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    Paper Information

    Category: Article

    Received: Jul. 30, 2019

    Accepted: --

    Published Online: Oct. 27, 2020

    The Author Email: Su Yuhao (suyuhao@tju.edu.cn)

    DOI:10.12086/oee.2020.190451

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