In order to deeply explore the damage characteristic and damage morphology of multi-layer optical components in inertial confinement fusion (ICF) optical system, 1053 nm laser pulses with different widths of 240, 35, 6 ps have been used to research damage ablation and damage resistant experiments at large area damage pits at 45° high reflection film. By comparing the morphology and damage resistant threshold of the ablation pits at different pulse widths, the results show that it is superior to use ultra-short pulse to repair multi-layers optical components, and the shorter pulse width is used, the better results can be got. The results of scanning ablation indicate that with the help of three-dimensional control system, the better repairing status can be got by changing the shape of the ablation pits.