Journal of Synthetic Crystals, Volume. 54, Issue 2, 233(2025)

Mist CVD Grown High-Phase-Purity α-Ga2O3 and Its Photoresponse Performance

YAO Suhao1, ZHANG Maolin1,2, JI Xueqiang1,2, YANG Lili1,2, LI Shan1,2, GUO Yufeng2, and TANG Weihua1,2、*
Author Affiliations
  • 1Innovation Center for Gallium Oxide Semiconductor (IC-GAO), College of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China
  • 2National and Local Joint Engineering Laboratory for RF Integration and Micro-Packing Technologies, Nanjing University of Posts and Telecommunications, Nanjing 210023, China
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    Ultra-wide bandgap semiconductor gallium oxide (Ga2O3) has important applications in power electronics and information sensing, its efficient and economical preparation is important to realize its industrial promotion. In this paper, a Sn-assisted mist chemical vapor deposition (mist CVD) technique is reported, based on which high-quality pure-phase α-Ga2O3 thin films were successfully epitaxially grown on c-plane sapphire substrates by this non-vacuum, low-cost method. The mist CVD growth temperature regulation experiment shows that the temperature for epitaxial growth of pure-phase α-Ga2O3 thin films is between 500 and 600 ℃. The physical phase, morphology, optical features, elemental content and valence of the pure-phase α-Ga2O3 thin films were characterized by using X-ray diffraction (XRD), scanning electron microscopy (SEM), UV-visible spectrophotometer, and X-ray photoelectron spectrometer (XPS) techniques. The results indicate that the α-Ga2O3 thin films grown at the temperature of 600 ℃ possess a higher degree of crystallinity, a denser and flatter surface morphology. Further, the deep-UV (DUV) photoresponse properties of α-Ga2O3 thin films were investigated by constructing photodetectors with metal-semiconductor-metal (MSM) structures. For α-Ga2O3 thin films prepared at 500 and 600 ℃, the photodetectors show photo-to-dark current ratios (PDCR) of 5.85×105 and 7.48×103, external quantum efficiencies (EQE) of 21.8% and 520%, and responsivities of 0.044 and 1.09 A/W, respectively. Under 6 V bias voltage and 254 nm illumination, the response time is 0.97/0.36 s for α-Ga2O3 thin film grown at 500 ℃, while it increases to 2.89/4.92 s for the sample grown at 600 ℃, which may be ascribed to the formation of donor impurities within the α-Ga2O3 thin films by Sn-assisted growth, and affecting the carrier transport efficiency.

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    YAO Suhao, ZHANG Maolin, JI Xueqiang, YANG Lili, LI Shan, GUO Yufeng, TANG Weihua. Mist CVD Grown High-Phase-Purity α-Ga2O3 and Its Photoresponse Performance[J]. Journal of Synthetic Crystals, 2025, 54(2): 233

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    Paper Information

    Category:

    Received: Oct. 28, 2024

    Accepted: Mar. 31, 2025

    Published Online: Mar. 31, 2025

    The Author Email: TANG Weihua (whtang@njupt.edu.cn)

    DOI:10.16553/j.cnki.issn1000-985x.2024.0260

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