Piezoelectrics & Acoustooptics, Volume. 44, Issue 6, 890(2022)
Study on Preparation and Polarization of Piezoelectric Actuator with Tubular Interdigitated Electrodes
The PZT-52 piezoelectric ceramic column was prepared in this paper. The interdigitated electrodes were fabricated on the surface of piezoceramic substrate by screen printing, and the printing process flow of cylindrical ceramic surface electrodes was studied. The polarization tests of the samples were carried out using the oil bath thermal polarization method. By testing the free axial displacements of the actuators, the effect of the polarization time on the displacements of the piezoceramic actuator was studied. And the influence principle of polarization time on the domain turning and silver electrode forming quality was analyzed. The results show that the axial displacement increases gradually with the increase of polarization time. When the polarization voltage is 500 V, the polarization tempaerature is 110 ℃, and the polarization time is 60 min, the maximum displacement of the actuator is 0.30 μm.
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ZENG Aoke, LIU Yonggang, YAN Pengfei, ZHANG Shuliang. Study on Preparation and Polarization of Piezoelectric Actuator with Tubular Interdigitated Electrodes[J]. Piezoelectrics & Acoustooptics, 2022, 44(6): 890
Received: Mar. 4, 2022
Accepted: --
Published Online: Jan. 27, 2023
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