Chinese Journal of Lasers, Volume. 22, Issue 1, 9(1995)
High-efficiency Second-harmonic Generation of a Copper Vapor Laser in BBO and its Application in Photolithography
A second-harmonic of a copper vapor laser whichis output from an oscillatoramplifer system with a self-fliering unstable resonator is generated in BBO crystal by a line focus. The conversion efficiency reached 14.4% at 5.4 W fundamental power. A pattern of 1.0 μm lines and spases is resolved by contact photolithography on 255.3 urn line for the first time.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. High-efficiency Second-harmonic Generation of a Copper Vapor Laser in BBO and its Application in Photolithography[J]. Chinese Journal of Lasers, 1995, 22(1): 9
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