The structures and particle size of Ni-P alloy film coated on single crystal silicon substrate by chemical deposition were observed with scanning electron microscope (SEM), and its residual stresses after chemical deposition were measured by X-ray diffraction (XRD). At the same time, residual stresses of Ni-P alloy film coated on silicon substrate by laser heat treatment were measured, and effects of residual stress of the film on wear property and interfacial bonding strength were analyzed. The experimental results showed that residual stresses of Ni-P alloy film coated on silicon substrate by chemical deposition are behaved as tensile stress, its residual stresses vary after laser heat treatment, and high tensile tress is changed into low tensile stress or compressive stress. The effect of residual stress of the film on its wear property is obvious, and its wear extent decreases with fall of residual stress. Bonding strength of the film-substrate system decreases with residual stress increase, and reasonable parameters of laser heat treatment may control residual stress of the film accurately, and increase bonding strength of the film-substrate.