Piezoelectrics & Acoustooptics, Volume. 44, Issue 2, 294(2022)

Design and Optimization of Piezoelectric MEMS Speakers

WANG Xiaojie1,2 and AN Zhiwu1,2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    In order to improve the sound pressure level(SPL) of piezoelectric micro-electro-mechanical systems(MEMS) speakers, a novel speaker diaphragm structure is proposed in this paper, The structure consists of four identical fan-ring driving units and a circular mass block in the middle, and the upper surface is covered with a layer of flexible material, forming a rigid-flexible-coupling sealed vibration membrane, The parameters such as radius r2 of the circular mass block and angle θ of adjacent fan rings were optimized, It was found that the maximum SPL was obtained when θ=50° and r2 =700 μm, The sound pressure level of the novel structure proposed in this paper is 5 dB higher than that of the optimized clamped circular multilayer diaphragm under the condition that the diaphragm area is the same and the resonant frequency is basically the same,

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    WANG Xiaojie, AN Zhiwu. Design and Optimization of Piezoelectric MEMS Speakers[J]. Piezoelectrics & Acoustooptics, 2022, 44(2): 294

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    Paper Information

    Special Issue:

    Received: Mar. 12, 2022

    Accepted: --

    Published Online: Jun. 14, 2022

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2022.02.029

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