Laser & Optoelectronics Progress, Volume. 61, Issue 19, 1913024(2024)

Silicon-Nitride Optical Engine Chip for Integrated Fiber-Optic Gyroscope

Jialong Li1,3,4, Yanan Niu2, Changkun Feng3,4, Tengjiao Jiang3,4, Shuxian Li1、*, and Jiadong Li3,4
Author Affiliations
  • 1College of Mechanical Engineering, Dalian University, Dalian 116622, Liaoning , China
  • 2Mechanical and Electrical College, Handan University, Handan 056000, Hebei , China
  • 3Suzhou Institute of Nano-Tech and Nano-Bionics Lightweight Laboratory, Chinese Academy of Sciences, Suzhou 215123, Jiangsu , China
  • 4Key Laboratory of Multifunctional Nanomaterials and Smart Systems, Chinese Academy of Sciences, Suzhou 215123, Jiangsu , China
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    To fulfill the urgent demand for the miniaturization and cost reduction of fiber-optic gyroscopes in inertial navigation systems, an integrated optical engine chip for fiber-optic gyroscopes based on high-aspect-ratio silicon-nitride waveguides is proposed and designed. This chip offers on-chip functions such as light-source coupling, beam splitting, transmission, and polarization. The optical engine chip mainly comprises two 1×2 multimode interference (MMI) beam splitters and polarizers. The important parameters of the chip were simulated and calculated using Luminary FDTD to determine the size of the MMI beam splitter, which is 15 μm × 200 μm. The polarization extinction ratio can reach 33 dB and the splitting is uniform. Finally, a low-loss processing method for silicon-nitride optical engine chips is devised. The designed high-aspect-ratio silicon-nitride optical engine chip serves as a solid foundation for the miniaturization and integration of high-precision fiber-optic gyroscopes.

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    Jialong Li, Yanan Niu, Changkun Feng, Tengjiao Jiang, Shuxian Li, Jiadong Li. Silicon-Nitride Optical Engine Chip for Integrated Fiber-Optic Gyroscope[J]. Laser & Optoelectronics Progress, 2024, 61(19): 1913024

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    Paper Information

    Category: Integrated Optics

    Received: Jan. 23, 2024

    Accepted: Feb. 5, 2024

    Published Online: Nov. 5, 2024

    The Author Email: Shuxian Li (lsx9909@163.com)

    DOI:10.3788/LOP240578

    CSTR:32186.14.LOP240578

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