A structure which consists of photoresist film sandwiched by Ag nano-particle and metal film is proposed to modify localized hotspot both in transversal and longitudinal direction. It shows that there is strong plasmonic coupling between Ag nano-particle and metallic surface, which helps to reduce the width and elongate the depth of the plasmonic hotspot localized inside photoresist film. And that fringes and side lobes around hotspots can be effective attenuated by bottom-side illumination. Influences of illumination, particles inter-space, and polarization are also studied. The method opens avenue for the potential applications such as lithography, optical storage, etc.