Chinese Journal of Lasers, Volume. 14, Issue 11, 667(1987)
Projection type holographic microscope (PHM) with double projection objectives and a holographic screen
A projection-type holographic microscope with double projection-objectives and a holographic screen used for integrated circuits assembly and quality control is described. The optical principle of PHM, recording scheme of holographic dispersion of screen and relative parameters of PHM are discussed.
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Xu Kunxian. Projection type holographic microscope (PHM) with double projection objectives and a holographic screen[J]. Chinese Journal of Lasers, 1987, 14(11): 667
Category: laser devices and laser physics
Received: Aug. 11, 1986
Accepted: --
Published Online: Aug. 10, 2012
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CSTR:32186.14.