Low-energy ion-assisted deposition of Ta<sub>2</sub>O<sub>5</sub> films

Acta Optica Sinica, Volume. 8, Issue 5, 454(1988)

Low-energy ion-assisted deposition of Ta₂O₅ films

ZHOU JIuliN, ZHANG WAN, and YAnG DELI

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ZHOU JIuliN, ZHANG WAN, YAnG DELI. Low-energy ion-assisted deposition of Ta₂O₅ films[J]. Acta Optica Sinica, 1988, 8(5): 454

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Category: Thin Films

Received: May. 4, 1987

Accepted: --

Published Online: Sep. 16, 2011

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