Semiconductor Optoelectronics, Volume. 46, Issue 3, 403(2025)

Low-Frequency Accelerometer Calibration System Based on Homodyne Laser Interferometry

LOU Lihan1, ZUO Aibin2, ZHOU Jinfeng1, and DAI Rong3
Author Affiliations
  • 1School of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing 100124, CHN
  • 2National Institute of Metrology, Beijing 100029, CHN
  • 3Yunnan Institute of Measurement and Testing Technology, Kunming 650100, CHN
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    To solve the issues of insufficient memory and low processing speed caused by excessive data volume in low-frequency calibration under existing calibration methods, a low-frequency accelerometer calibration system based on homodyne laser interference is developed. The error-compensation method is proposed by analyzing nonlinear errors, particularly the non-orthogonal phase error. Using the dynamic successive phase unwrapping method and the self-adaptive dynamic decomposition algorithm for data acquisition and processing, the sampling rate and data volume are reduced, and the calibration accuracy is ensured. Experimental results show that the system can achieve high-accuracy sensitivity calibration of the accelerometer in the frequency range from 0.1 to 80 Hz and satisfy the test requirements of low-frequency calibration.

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    LOU Lihan, ZUO Aibin, ZHOU Jinfeng, DAI Rong. Low-Frequency Accelerometer Calibration System Based on Homodyne Laser Interferometry[J]. Semiconductor Optoelectronics, 2025, 46(3): 403

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    Paper Information

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    Received: Apr. 16, 2025

    Accepted: Sep. 18, 2025

    Published Online: Sep. 18, 2025

    The Author Email:

    DOI:10.16818/j.issn1001-5868.20250416002

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