Chinese Journal of Liquid Crystals and Displays, Volume. 35, Issue 2, 108(2020)

Low coherence carrier frequency interference method for measurement of the liquid crystal cell surface

YANG Guang1, CHEN Lei2, HU Chen-hui2, ZHANG Zheng-yu2, and ZHU Wen-hua2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less

    The quality of the liquid crystal cell surface can affect the performance of the spatial light modulator. In order to accurately measure the liquid crystal cell surface, a low coherent carrier frequency interference method is proposed. Illuminating with a low coherent extended light source, forming a localized interference between the reference light and the test light, and adding a suitable carrier frequency by controlling the tilt angle between the reference surface and the surface of the liquid crystal cell, the carrier frequency interference fringe to be tested is obtained. The upper and lower surfaces of the air layer of the empty liquid crystal cell form a background interference fringe, so that a single carrier frequency interference pattern with a set of interference fringes is collected in the CCD camera. The frequency information of the background and the interference fringes is filtered by the spatial Fourier transform method, and the surface data of the fringes to be tested is extracted and restored. The surface of the liquid crystal cell made by dislocation bonding of two glass substrates was tested. The peak-to-valley value PV of the surface is 8.28λ, and the root mean square value RMS is 178λ. Comparative experimental results conducted by the method and ZYGO interferometer indicate that the differences of PV and RMS are 0.02λ and 0.004λ. The results obtained by the two measurement methods are consistent. The method can overcome the problem of multi-surface interference and measure the liquid crystal cell surface precisely.

    Tools

    Get Citation

    Copy Citation Text

    YANG Guang, CHEN Lei, HU Chen-hui, ZHANG Zheng-yu, ZHU Wen-hua. Low coherence carrier frequency interference method for measurement of the liquid crystal cell surface[J]. Chinese Journal of Liquid Crystals and Displays, 2020, 35(2): 108

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Jul. 2, 2019

    Accepted: --

    Published Online: Mar. 26, 2020

    The Author Email:

    DOI:10.3788/yjyxs20203502.0108

    Topics