Chinese Journal of Lasers, Volume. 21, Issue 5, 361(1994)
Progress of Excimer Lasers and Its Applications
In this paper, the recent progress of high pulse energy, high pulse power and average power excimer lasers are presented, their applications in scientific research, industry and medicine are also discussed.
Get Citation
Copy Citation Text
[in Chinese]. Progress of Excimer Lasers and Its Applications[J]. Chinese Journal of Lasers, 1994, 21(5): 361