It is proposed to build a new type of laser self-hybrid interference system, use the laser self-mixed interference effect, and select the narrow line width and low noise line polarizing solid laser as a light source, increase the EOM electro-light modulation crystal, and introduce electro-optic orthogonal modulation and demodulation algorithms. Experimental and theoretical analysis shows that laser self-hybrid interference can achieve vibration measurement under weak feedback, and the newly constructed self-hybrid system structure is simple, convenient to operate, and easy to achieve miniaturization.The problem of migration of the jump point improves the speed of signal processing and the real time of measurement.Therefore, the laser self-hybrid interference instrument of the electro-lighting and demodulation can overcome the limitations of the target mirror on the application scenarios of the interference instrument, and realize the real-time measurement of the nano-level high-precision of the non-co-operating surface.