Optics and Precision Engineering, Volume. 33, Issue 7, 1019(2025)
Full-field heterodyne dynamic interferometric measurement with double-prism configuration
To improve measurement applicability and reduce the impact of stray light and frequency mixing on interferometric results, a high-precision, low-noise dynamic interferometric measurement system is proposed. This system is based on a novel double-prism dynamic interferometer design, suitable for full-field heterodyne dynamic interferometric measurement techniques. It addresses the effects of frequency mixing on measurement results, further mitigates the influence of stray light, and utilizes ideal fiber-optic output to replace the reference surface, thereby avoiding the impact of reference surface nonuniformity on measurement accuracy. This paper explains the basic configuration of the interferometer, describes the measurement principles, models and simulates stray light in the new double-prism structure, provides additional analysis on frequency mixing errors, and presents experimental validation of stray light and frequency mixing effects.Experimental results show that the stray light in the divergent structure differ by up to an order of magnitude of 3.2 compared to those in the parallel light structure. This configuration is free from frequency mixing effects. When measuring a component with a 3% reflectivity, the introduced surface shape measurement error is less than 0.015 5λ relative to the Twyman-Green configuration, which is consistent with simulation results.The full-field heterodyne dynamic measurement technique based on the double-prism configuration enhances measurement applicability, reduces the impact of stray light frequency mixing on low-frequency measurement results, suppresses the effects of frequency mixing, and further improves the measurement accuracy of the interferometer.
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Qilu JIAO, Conghui ZHU, Tong LYU, Zhou WU, Wenxi ZHANG. Full-field heterodyne dynamic interferometric measurement with double-prism configuration[J]. Optics and Precision Engineering, 2025, 33(7): 1019
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Received: Jan. 9, 2025
Accepted: --
Published Online: Jun. 23, 2025
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