Infrared Technology, Volume. 42, Issue 10, 953(2020)
Influence of Different Passivation Films on the Performance of InSb Photovoltaic Detector
Three different passivation films were used to prepare InSb detectors for testing the current–voltage(I-V) characteristic curves of chips with different perimeter–area ratios. The influence of surface leakage current on the performance of an InSb detector was analyzed by comparing the dark-current density at a bias voltage of ?0.1 V. The test results indicated that SiO2+SiNx passivation could significantly reduce the surface dark current. The capacitance–voltage(C-V) test results also demonstrated that the composite passivation film could significantly reduce the interface fixed charge. A composite passivation-film process was applied for the preparation of a 128?128 15-?m InSb focal plane detector. The optimal value factor of the detector chip was R0A ≥5?104·cm2, which was much higher than that before the test (R0A≈5×103·cm2).
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GONG Xiaoxia, XIAO Tingting, YANG Ruiyu, LI Bingzhe, SHANG Falan, SUN Xiangle, ZHAO Yupeng, CHEN Dongqiong, YANG Wenyun. Influence of Different Passivation Films on the Performance of InSb Photovoltaic Detector[J]. Infrared Technology, 2020, 42(10): 953
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Received: Jul. 27, 2020
Accepted: --
Published Online: Nov. 25, 2020
The Author Email: Xiaoxia GONG (641592956@qq.com)
CSTR:32186.14.