Chinese Journal of Lasers, Volume. 29, Issue 1, 40(2002)
Study on Metastable Neon Beam Source Used for Atom Lithography
A neon metastable beam source was built up, from which Neon metastable beam of the intensity of 3.3×10 14 atoms/s·Sr. was generated. The characteristics of the metastable Neon beam were studied, and the corresponding mechanisms are discussed.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on Metastable Neon Beam Source Used for Atom Lithography[J]. Chinese Journal of Lasers, 2002, 29(1): 40
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