The flat polarizer was prepared by electron beam evaporation and its optical performance was measured by Lambda900 spectrometer. The transmission of P-polarization is more than 98%, the transmission of S-polarization is less than 0.5%, its extinction ratio is more than 200:1, and its spectral bandwidth is 20 nm near 1053 nm. The laser-induced damage thresholds (LIDTs) of P-polarization and S-polarization are 17.2 J/cm2 and 19.6 J/ cm2, respectively, measured at 1064 nm wavelength,12-ns pulse width and the incident angle of 60°. The morphology of the laser-induced damage was characterized by Nomarski microscopy and its depth was measured by Alpha-500 step meter. Two distinct damage morphologies (defect and delamination) were observed when polarizer was tested in P-polarization. The character of interface caused the outer layer delamination damage morphology and which happened at hafnia-silica interface of the outer layer. The defect damage was induced by the defects in the film, and it appeared in the interior of the polarizer. In the case of S-polarization,the outer layer delamination damage morphology,which was induced by standing electric field was also observed.