Optical Instruments, Volume. 47, Issue 1, 72(2025)

A photoelectric autocollimator system design with high measurement stability

Qian XIAO1... Xiantong YU1,*, Jun ZHOU1, Kuigui LIU1 and Jigang CHEN2 |Show fewer author(s)
Author Affiliations
  • 1School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
  • 2Shanghai Institute of Precision Metrology and Testing, Shanghai 200090, China
  • show less

    The photoelectric autocollimator has the characteristic of strong optical path dependence in the angle measurement process, so it is easy to cause unstable measurement results. In order to solve the above problem, this paper analyzes the influence of the partial occlusion of the optical path of the system on the measurement error, and establishes a mathematical model of the angular error to test the autocollimator. Combined with the analysis results, the geometric parameters of the splitter were optimized to reduce the dependence of the measurement results on the optical path, and the optical system of the autocollimator was further optimized to deal with the fluctuation of the measurement results caused by the low energy transmission efficiency after the narrowing of the slit. At the same time, the optical path structure of double-CCD sampling is proposed to reduce the data fluctuation caused by random errors or the false target caused by too few data. The results show that the designed autocollimator optical system has the advantages of good stability and simple structure. The modulation transfer function value of each field at 62.5 lp/mm is higher than 0.2, the maximum distortion value is less than 0.0052%, and the energy transmission is close to the diffraction limit. It provides reference for improving the measurement stability of the photoelectric autocollimator.

    Keywords
    Tools

    Get Citation

    Copy Citation Text

    Qian XIAO, Xiantong YU, Jun ZHOU, Kuigui LIU, Jigang CHEN. A photoelectric autocollimator system design with high measurement stability[J]. Optical Instruments, 2025, 47(1): 72

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Jan. 18, 2024

    Accepted: --

    Published Online: Apr. 1, 2025

    The Author Email: Xiantong YU (xtyu@usst.edu.cn)

    DOI:10.3969/j.issn.1005-5630.202401180009

    Topics