Laser & Optoelectronics Progress, Volume. 62, Issue 9, 0936001(2025)

High-Performance Thin-Film Lithium Niobate Heterogeneous Integrated Photodetector Array

Xuhui Xu1,2, Chao Wei1,2, Chenghao Wang1,2, Yake Chen1,2, Tengmu Chen1,2, Shiyong Peng1,2, Xihua Zou1,2, Wei Pan1,2, Xiaojun Xie1,2、*, and Lianshan Yan1,2
Author Affiliations
  • 1Key Laboratory of Optoelectronic Fusion Integration and Communication Sensing, Ministry of Education, Southwest Jiaotong University, Chengdu 611756, Sichuan , China
  • 2School of Information Science & Technology, Southwest Jiaotong University, Chengdu 611756, Sichuan , China
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    The design and fabrication of a InP/InGaAs modified uni-traveling carrier photodetector array heterogeneously integrated on the thin-film lithium niobate platform was proposed and fabricated. The 1×N multimode interferometers were employed to ensure uniform distribution of input optical power to each photodetector unit. Experimental results demonstrate that the 1×2, 1×3, and 1×4 photodetector arrays achieve 3 dB bandwidths of 50 GHz, 45 GHz, and 40 GHz, respectively. The device was applied in an intensity modulation direct detection system, successfully achieving high-quality reception of 60 Gbaud and 100 Gbaud four-level pulse amplitude modulation signals.

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    Xuhui Xu, Chao Wei, Chenghao Wang, Yake Chen, Tengmu Chen, Shiyong Peng, Xihua Zou, Wei Pan, Xiaojun Xie, Lianshan Yan. High-Performance Thin-Film Lithium Niobate Heterogeneous Integrated Photodetector Array[J]. Laser & Optoelectronics Progress, 2025, 62(9): 0936001

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    Paper Information

    Category: Letters

    Received: Feb. 11, 2025

    Accepted: Mar. 26, 2025

    Published Online: May. 6, 2025

    The Author Email: Xiaojun Xie (xxie@swjtu.edu.cn)

    DOI:10.3788/LOP250616

    CSTR:32186.14.LOP250616

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