Chinese Journal of Lasers, Volume. 31, Issue s1, 495(2004)
Testing the Depth of Phase Grating by Optical Power Spectrum
Acording to Fourier optics, when a plane wave through a grating,the angle of different order and relative intensity are decided by the grating, many information of gratings can be deduced from its diffraction power spectrum. A new method using power spectrum of different orders to measure depth of phase gratings.three gratings were tested in this paper and the calculated depth was givem. The testing results of diffractive order of 6 gratings-about many orders itensity-were listed in table, The error of results is under 5%.
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Cao Xiang-qun, Lian Hua, LI He-li. Testing the Depth of Phase Grating by Optical Power Spectrum[J]. Chinese Journal of Lasers, 2004, 31(s1): 495
Category: laser devices and laser physics
Received: --
Accepted: --
Published Online: Jan. 29, 2013
The Author Email: Xiang-qun Cao (lh88@mail.hz.zj.cn)
CSTR:32186.14.