Semiconductor Optoelectronics, Volume. 46, Issue 1, 23(2025)
High-resolution Interline Transfer CCD Image Sensor with Low Smear
A low-smear interline transfer charge coupled device (CCD) image sensor, with an effective array size of 2 048×2 048 elements and a pixel size of 9 μm × 9 μm, was designed and developed. To achieve low-smear characteristics, a p-well was designed and fabricated to form a barrier around the vertical CCD buried channel, reducing the entry of photo generated electrons into the channel. A microlens array was designed and fabricated in the photosensitive region to converge incident light into the photosensitive region and reduce stray light entering the vertical CCD channel. A light-blocking tungsten metal cover was designed and produced for the vertical CCD outside the photosensitive area. After testing, the device dispersion reached −82 dB, which meets the normal use requirements of the device.
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CHENG Shunchang, YANG Hong, BAI Xueping, HUANG Fang, LIU Ya, ZHANG Qingwei. High-resolution Interline Transfer CCD Image Sensor with Low Smear[J]. Semiconductor Optoelectronics, 2025, 46(1): 23
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Received: Dec. 3, 2024
Accepted: Sep. 18, 2025
Published Online: Sep. 18, 2025
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