Chinese Journal of Lasers, Volume. 31, Issue s1, 519(2004)

Characters Study of the ZrO2 Films in Different Oxygen Partial Pressure

ZHANG Dong-ping*, SHAO Jian-da, SHAO Shu-ying, Qi Hong-ji, GAO Wei-dong, and FAN Zheng-xiu
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    ZrO2 films were deposited by electron beam evaporation in different oxygen pressure. The effect of oxygen pressure during film deposition on the films' microstructure, optical characters and laser induced damage threshold (UDT) were studied by scanning probe microscopy, optical spectrometer and UDT measurement.

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    ZHANG Dong-ping, SHAO Jian-da, SHAO Shu-ying, Qi Hong-ji, GAO Wei-dong, FAN Zheng-xiu. Characters Study of the ZrO2 Films in Different Oxygen Partial Pressure[J]. Chinese Journal of Lasers, 2004, 31(s1): 519

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    Paper Information

    Category: laser devices and laser physics

    Received: --

    Accepted: --

    Published Online: Jan. 29, 2013

    The Author Email: Dong-ping ZHANG (zdp@siom.ac.cn)

    DOI:

    CSTR:32186.14.

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