Chinese Journal of Lasers, Volume. 16, Issue 10, 603(1989)
Preparation of AIN thin film by magnetron sputtering
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Fan zhengxiu, He Chaoling. Preparation of AIN thin film by magnetron sputtering[J]. Chinese Journal of Lasers, 1989, 16(10): 603
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Received: Mar. 14, 1988
Accepted: --
Published Online: Aug. 13, 2012
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CSTR:32186.14.
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