Chinese Journal of Lasers, Volume. 29, Issue 3, 263(2002)
Multi-beam Confocal System Using Pinhole Array
The 500×500 pinhole array is used in the multi-beam confocal system for 3D measurement. The equipment needn't mechanical rotation, thus it is simple in the mechanism, also the measuring field is larger. With the interpolation technique, the 3D profile can be got quickly with high precision.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Multi-beam Confocal System Using Pinhole Array[J]. Chinese Journal of Lasers, 2002, 29(3): 263
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