Piezoelectrics & Acoustooptics, Volume. 44, Issue 5, 700(2022)

Research on Ultra Wide-Band and High-Frequency XBAR Resonator

YU Zhenyi1, GUO Yu1, FU Sulei2, SU Rongxuan3, LI Baichuan4, ZHANG Shuai1, XU Huiping3, PAN Feng3, and WANG Weibiao2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    With the arrival of 5G communication era, the resonator with high-frequency and ultra wide-bandwith has become an urgent demand of the communication industry. In this paper, a laterally excited bulk acoustic wave resonator (XBAR) with high frequency and ultra wide-bandwidth is designed and fabricated. The resonance frequency of the A1 mode resonator is 5.81 GHz, electromechanical coupling coefficient is up to 39.6% and a Q-3 dB value is 248, and the A3 mode shows a resonance frequency of 17.04 GHz and electromechanical coupling coefficient of 7.0%.The measured temperature coefficient of frequency (TCF) of the A1 and A3 modes of the resonator are -72.6×10-6/℃ and -38.5×10-6/℃, respectively. In addition, a new interdigital electrode (IDT) structure is proposed in this paper, which can suppress the spurious mode and greatly improve the performance of the resonator.

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    YU Zhenyi, GUO Yu, FU Sulei, SU Rongxuan, LI Baichuan, ZHANG Shuai, XU Huiping, PAN Feng, WANG Weibiao. Research on Ultra Wide-Band and High-Frequency XBAR Resonator[J]. Piezoelectrics & Acoustooptics, 2022, 44(5): 700

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    Paper Information

    Special Issue:

    Received: Aug. 31, 2022

    Accepted: --

    Published Online: Jan. 27, 2023

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2022.05.007

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